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Magnet-free uniform sputtering of dielectric film by RF ...
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Magnet-free uniform sputtering of dielectric film by RF ...
Website URL:
http://iopscience.iop.org/article/10.7567/JJAP.55.086202/meta
Category:
Retailing
Magnet-free uniform sputtering of dielectric film by RF and microwave power superposition. Kensuke Sasai, ... Gunjo Y., Toyoda H. and Sugai ... Export citations ...
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